Check signal waveform in standby, prep and ready 2 condition before
the exposure starts. The chamber signal at EZ150 X4 should not be
greater than the values listed below. Otherwise the problem source
has to be investigated.
- > 20mV release 3.3
- > 80mV release 3.5
This error is solved in R3.5 SW with FCO
74200002. This FCO is "Retrofit on Failure" so it
will not automatically come to the site.
Does not exist at release 2.x generators.
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